A CMOS biocompatible charge detector for biosensing applications

LAI, STEFANO;LOI, DANIELA;BARBARO, MASSIMO
2012-01-01

Abstract

A solid-state CMOS device capable of detecting the changes of electric charge caused by a chemical or biological reaction is presented. The device is fully compatible with a standard CMOS process. Bio-compatibility is obtained by passivation of the active area with a layer of alumina obtained with a simple, low-cost and reliable process. A test chip hosting 80 sensors has been realized and characterized showing the detection capabilities of the novel sensor. Re-usability of the device by stripping of the alumina layer was proved.
2012
Inglese
59
9
2512
2519
8
WOS:000307905200036
2-s2.0-84865517553
Esperti anonimi
scientifica
Biosensors, CMOS process, double-gate fieldeffect transistors (FETs)
no
Lai, Stefano; Caboni, A; Loi, Daniela; Barbaro, Massimo
1.1 Articolo in rivista
info:eu-repo/semantics/article
1 Contributo su Rivista::1.1 Articolo in rivista
262
4
reserved
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