Sviluppo di un sensore interferometrico per il controllo del posizionamento di un rugosimetro ottico

BALDI, ANTONIO;BERTOLINO, FILIPPO;GINESU, FRANCESCO;Scanu A.

2001-01-01

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Abstract

The optical profilometer that is under development at the Mechanical Engineering Department of the University of Cagliari (DiMeCa) requires a translation stage able to displace part of the optical system with sub-micrometric resolution. This work describes the development of an interferometric displacement sensor which enables, by its feedback, to accurately control an otherwise open loop controlled electrostrictive translation stage. After a short description of the optical system, the mechanical assembly, the electronic module and the software interface will be described. At the end some experimental result, showing the performances of the sensor will be illustrated.