Design and fabrication of effective gradient temperature sensor array based on bilayer SnO2/Pt for gas classification

Nguyen VD;Thai NX;Ngoc TM;Thi Thanh Le D;Hung CM;Nguyen H;Tonezzer M;Van Hieu N;Hoa ND

2022-01-01

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Abstract

Classification of different gases is important, and it is possible to use different gas sensors for this purpose. Electronic noses, for example, combine separated gas sensors into an array for detecting different gases. However, the use of separated sensors in an array suffers from being bulky, high-energy consumption and complex fabrication processes. Generally, gas sensing properties, including gas selectivity, of semiconductor gas sensors are strongly dependent on their working temperature. It is therefore feasible to use a single device composed of identical sensors arranged in a temperature gradient for classification of multiple gases. Herein, we introduce a design for simple fabrication of gas sensor array based on bilayer Pt/SnO2 for real-time monitoring and classification of multiple gases. The study includes design simulation of the sensor array to find an effective gradient temperature, fabrication of the sensors and test of their performance. The array, composed of five sensors, was fabricated on a glass substrate without the need of backside etching to reduce heat loss. A SnO2 thin film sensitized with Pt on top deposited by sputtering was used as sensing material. The sensor array was tested against different gases including ethanol, methanol, isopropanol, acetone, ammonia, and hydrogen. Radar plots and principal component analysis were used to visualize the distinction of the tested gases and to enable effective classification.