New paradigm for EBIC amplifier on FIB X-section

Valerio Sanna Valle;Giovanna Mura;Gian Paolo Apeddu
2019-01-01

Abstract

Electron Beam Induced Current is a powerful tool for Scanning Electron Microscopy (SEM) imaging mode. In this paper, the history and evolution of this technique are discussed. Some important defects are presented as well as their technological interpretation. A new custom amplifier is presented and its implementation in Time Resolved EBIC (TREBIC) is also proposed, the main differences with EBIC are pointed out.
2019
Inglese
ISTFA 2019: Conference Proceedings from the 45th International Symposium for Testing and Failure Analysis
302
308
7
2-s2.0-85122634141
ISTFA 2019
Esperti anonimi
November 10–14, 2019
Portland, Oregon USA
internazionale
scientifica
sì
4 Contributo in Atti di Convegno (Proceeding)::4.1 Contributo in Atti di convegno
SANNA VALLE, Valerio; Perez, Guy; Bascoul, Guillaume; Chauvin, Helene; Viallet, Benoît; Mura, Giovanna; Apeddu, GIAN PAOLO
273
7
4.1 Contributo in Atti di convegno
none
info:eu-repo/semantics/conferencePaper
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