A two thickness interferometer for lattice strain investigations

MELIS, CLAUDIO;
2016-01-01

Abstract

We describe a test carried out by using a two-Thickness interferometer to investigate the effect of the surface stress on the measurement of the silicon lattice constant.
2016
Inglese
2016 Conference on Precision Electromagnetic Measurements (CPEM 2016)
Dazhen Gu, et al.
1
2
2
Institute of Electrical and Electronics Engineers (IEEE)
New York
978-1-4673-9134-4
WOS:000383955100345
2-s2.0-84986281586
Esperti anonimi
internazionale
scientifica
Avogadro constant; Optical interferometry; Precision measurements; Silicon lattice parameter; Surface stress; X-ray interferometry; Electrical and electronic engineering; Instrumentation
sì
info:eu-repo/semantics/bookPart
2.1 Contributo in volume (Capitolo o Saggio)
Massa, Enrico; Melis, Claudio; Sasso, Carlo Paolo; Kuetgens, Ulrich; Mana, Giovanni
2 Contributo in Volume::2.1 Contributo in volume (Capitolo o Saggio)
5
268
reserved
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